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Simulation of Semiconductor Devices and Processes formatIsbn:Softcover - 9783709173633 Letztendlich sind effektive Therapiemethoden unabdingbarSISDEP 95 provides an international forum for the presentation of state of the art research and development results in the area of numerical process and device simulation. Continuously shrinking device dimensions, the use of new materials, and advanced processing steps in the manufacturing of semiconductor devices require new and improved software. The trend towards increasing complexity in structures and process technology demands advanced models